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[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - MEMS gyroscope with double gimbal structure

✍ Scribed by Maenaka, K.; Sawai, N.; Ioku, S.; Sugimoto, H.; Suzuki, H.; Fujita, T.; Takayama, Y.

Book ID: 125548913
Publisher: IEEE
Year: 2003
Weight: 271 KB
Volume: 1
Category: Article
ISBN-13: 9780780377318
DOI: 10.1109/SENSOR.2003.1215278

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