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[IEEE IEEE International Electron Devices Meeting 2003 - Washington, DC, USA (8-10 Dec. 2003)] IEEE International Electron Devices Meeting 2003 - Integrated sensor and electronics processing for <10?8 "iMEMS" inertial measurement unit components

✍ Scribed by Lewis, S.; Alie, S.; Brosnihan, T.; Core, C.; Core, T.; Howe, R.; Geen, J.; Hollocher, D.; Judy, M.; Memishian, J.; Nunan, K.; Paine, R.; Sherman, S.; Tsang, B.; Wachtmann, B.

Book ID: 120819949
Publisher: IEEE
Year: 2003
Weight: 280 KB
Edition: 1
Category: Article
ISBN-13: 9780780378728
DOI: 10.1109/IEDM.2003.1269242

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