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[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - A suspended microchannel with integrated temperature sensors for high-pressure flow studies

✍ Scribed by Wu, S.; Mai, J.; Zohar, Y.; Tai, Y.C.; Ho, C.M.

Book ID: 126906520
Publisher: IEEE
Year: 1998
Weight: 682 KB
Category: Article
ISBN-13: 9780780344129
DOI: 10.1109/memsys.1998.659734

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