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[IEEE IEEE 1999 International Interconnect Technology Conference - San Francisco, CA, USA (24-26 May 1999)] Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247) - High density metal insulator metal capacitors using PECVD nitride for mixed signal and RF circuits

✍ Scribed by Kar-Roy, A.; Chun Hu, ; Racanelli, M.; Compton, C.A.; Kempf, P.; Jolly, G.; Sherman, P.N.; Jie Zheng, ; Zhe Zhang, ; Aiguo Yin,

Book ID: 118167832
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 283 KB
Edition: 1999
Volume: 0
Category: Article
ISBN-13: 9780780351745
DOI: 10.1109/iitc.1999.787134

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