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[IEEE ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures - Kobe, Japan (19-22 March 2001)] ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153) - Test chips for evaluating strong phase shift lithography

✍ Scribed by Ashton, R.A.; Kane, B.C.; Blatchford, J.W.; Shuttleworth, D.M.

Book ID: 126637578
Publisher: IEEE
Year: 2001
Weight: 489 KB
Category: Article
ISBN-13: 9780780365117
DOI: 10.1109/ICMTS.2001.928654

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