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[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - Characterisation of low-stress LPCVD silicon nitride in high frequency BJT's with self-aligned metallization

✍ Scribed by Van Zeijl, H.W.; Nanver, L.K.

Book ID: 120820589
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 233 KB
Edition: 1998
Category: Article
ISBN-13: 9780780343061
DOI: 10.1109/ICSICT.1998.785810

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