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[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - A deep trench isolation for silicon

✍ Scribed by Wang Qingping, ; Zhang Zhengfan, ; Li Kaicheng, ; Guo Lin, ; Xiangdong Wu, ; Wang Zihang,

Book ID: 118019596
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 213 KB
Edition: 1998
Volume: 0
Category: Article
ISBN-13: 9780780343061
DOI: 10.1109/icsict.1998.785843

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