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[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - Spin-on dielectric films-a general overview

✍ Scribed by Shi-Qing Wang,

Book ID: 126277235
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 60 KB
Edition: 1998
Category: Article
ISBN-13: 9780780343061
DOI: 10.1109/ICSICT.1998.786546

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