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[IEEE EuroSimE 2005. 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. - Berlin, Germany (April 18-20, 2005)] EuroSimE 2005. Proceedings of the 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. - Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs

โœ Scribed by Weide-Zaage, K.; Hein, V.


Book ID
126904937
Publisher
IEEE
Year
2005
Weight
936 KB
Category
Article
ISBN-13
9780780390621

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