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[IEEE ESSDERC 2011 - 41st European Solid State Device Research Conference - Helsinki, Finland (2011.09.12-2011.09.16)] 2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - Holed MEM resonators with high aspect ratio, for high accuracy frequency trimming

✍ Scribed by Civet, Yoan; Basrour, Skandar; Casset, Fabrice; Icard, Beatrice; Mercier, Denis; Carpentier, Jean-Francois; Bustos, Jessy; Leverd, Francois

Book ID: 126698439
Publisher: IEEE
Year: 2011
Weight: 736 KB
Category: Article
ISBN: 1457707071
DOI: 10.1109/ESSDERC.2011.6044219

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