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[IEEE Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Austin, TX, USA (16-17 May 1995)] Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Evaluation of 0.18 micron ultra-shallow doping technologies: a SEMATECH/university/industry cooperative research effort

✍ Scribed by Ishida, E.; Larson, L.

Book ID: 126711060
Publisher: IEEE
Year: 1995
Weight: 241 KB
Category: Article
ISBN-13: 9780780325968
DOI: 10.1109/UGIM.1995.514125

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