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[IEEE Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Austin, TX, USA (16-17 May 1995)] Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium - A new methodology for fast development of multilevel metallization for ULSI technology

✍ Scribed by Islam Raja, M.; El-Ghor, M.; Yin, D.; Pollack, G.

Book ID: 126697104
Publisher: IEEE
Year: 1995
Weight: 499 KB
Category: Article
ISBN-13: 9780780325968
DOI: 10.1109/UGIM.1995.514127

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