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[IEEE Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Austin, TX, USA (16-17 May 1995)] Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium - The influence of LOCOS related oxide etch backs on thin oxide leakage in memory devices

✍ Scribed by Turkman, R.; Braithwaite, R.

Book ID: 126601442
Publisher: IEEE
Year: 1995
Weight: 524 KB
Category: Article
ISBN-13: 9780780325968
DOI: 10.1109/UGIM.1995.514123

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