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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Finite element modeling of a capacitive micromachined ultrasonic transducer

✍ Scribed by Kirchmayer, B.J.; Moussa, W.A.; Checkel, M.D.

Book ID: 121266121
Publisher: IEEE Comput. Soc
Year: 2003
Weight: 298 KB
Category: Article
ISBN-13: 9780769519470
DOI: 10.1109/ICMENS.2003.1222032

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