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[IEEE 56th Electronic Components and Technology Conference 2006 - San Diego, CA (May 30 - June 2, 2006)] 56th Electronic Components and Technology Conference 2006 - Development of a Novel Deep Silicon Tapered Via Etch Process for Through-Silicon Interconnection in 3D Integrated Systems

โœ Scribed by Nagarajan, R.; Liao Ebin, ; Lee Dayong, ; Soh Chee Seng, ; Prasad, K.; Balasubramanian, N.


Book ID
120584953
Publisher
IEEE
Year
2006
Weight
469 KB
Category
Article
ISBN-13
9781424401529

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