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[IEEE 4th International Conference on Solid-State and IC Technology - Beijing, China (24-28 Oct. 1995)] Proceedings of 4th International Conference on Solid-State and IC Technology - Plasma etching damage to InGaAs/InP 2DEG material

✍ Scribed by Tianchun Ye, ; Ye Xunchun, ; Xiaoming Li,

Book ID: 121334018
Publisher: IEEE
Year: 1995
Weight: 219 KB
Category: Article
DOI: 10.1109/ICSICT.1995.503336

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