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[IEEE 32nd European Solid-State Device Research Conference - Firenze, Italy (2002.9.24-2002.9.26)] 32nd European Solid-State Device Research Conference - Impact of Source/drain Implants on Threshold Voltage Matching in Deep Sub-micron CMOS Technologies

✍ Scribed by Dubois, J.; Knol, J.; Bolt, M.; Tuinhout, H.; Schmitz, J.; Stolk, P.

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