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[IEEE 2014 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) - Kyoto, Japan (2014.6.19-2014.6.20)] 2014 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) - Characteristics of a microbridge type MEMS sensor for the thermal conductivity measurement of gases by a steady state method

✍ Scribed by Fujii, Kenta; Muraoka, Shigenobu; Omatu, Sigeru; Yano, Mitsuaki

Book ID: 126611861
Publisher: IEEE
Year: 2014
Weight: 331 KB
Category: Article
ISBN: 1479936146
DOI: 10.1109/IMFEDK.2014.6867052

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