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[IEEE 2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Belgium (2014.04.7-2014.04.9)] 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Measuring Young's modulus of polysilicon via cantilever microbeam arrays

✍ Scribed by Kehrberg, Steven; Dorwarth, Markus; Gunther, Sebastian; Markisch, Steffen; Geckeler, Carsten; Mehner, Jan

Book ID: 126740820
Publisher: IEEE
Year: 2014
Weight: 597 KB
Category: Article
ISBN: 1479947911
DOI: 10.1109/EuroSimE.2014.6813778

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