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[IEEE 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Suzhou, China (2013.08.26-2013.08.30)] 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale - Comprehensive optimization of pid-type closed-loop MEMS accelerometer system

✍ Scribed by Ma, Mingjun; Jin, Zhonghe; Hu, Shichang; Zhu, Huijie; Zhu, Zhongyi; Liu, Yidong

Book ID: 127065885
Publisher: IEEE
Year: 2013
Weight: 265 KB
Category: Article
ISBN: 1479912107
DOI: 10.1109/3m-nano.2013.6737429

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