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[IEEE 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Suzhou, China (2013.08.26-2013.08.30)] 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale - Coating method of micro pattern based on microscopic injection system

✍ Scribed by Ailong, Zhang; Xin, Zhao; Ming, Wu; Xizeng, Feng

Book ID: 126819094
Publisher: IEEE
Year: 2013
Weight: 373 KB
Category: Article
ISBN: 1479912107
DOI: 10.1109/3m-nano.2013.6737438

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