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[IEEE 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Xi'an, China (2012.08.29-2012.09.1)] 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Development of a micro accelerometer based MOEMS

✍ Scribed by Zhang, Bo; Li, Wen Feng

Book ID: 120226302
Publisher: IEEE
Year: 2012
Weight: 157 KB
Category: Article
ISBN: 146734589X
DOI: 10.1109/3M-NANO.2012.6472984

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