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[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Three dimensional transformation of Parylene thin film structures via thermoforming

✍ Scribed by Kim, B. J.; Chen, B.; Gupta, M.; Meng, E.

Book ID: 120268333
Publisher: IEEE
Year: 2013
Weight: 648 KB
Category: Article
ISBN: 1467356549
DOI: 10.1109/MEMSYS.2013.6474247

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