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[IEEE 2012 IEEE International SOI Conference - Napa, CA, USA (2012.10.1-2012.10.4)] 2012 IEEE International SOI Conference (SOI) - Taking the next step on advanced HKMG SOI technologies — From 32nm PD SOI volume production to 28nm FD SOI and beyond

✍ Scribed by Horstmann, Manfred; Hoentschel, Jan; Schaeffer, Jamie

Book ID: 118269778
Publisher: IEEE
Year: 2012
Weight: 611 KB
Category: Article
ISBN: 1467326895
DOI: 10.1109/soi.2012.6404364

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