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[IEEE 2011 International Semiconductor Device Research Symposium (ISDRS) - College Park, MD, USA (2011.12.7-2011.12.9)] 2011 International Semiconductor Device Research Symposium (ISDRS) - Advanced contact and junction technologies for improved parasitic resistance and short channel immunity in FinFETs beyond 22nm node

✍ Scribed by Ang, K.-W.; Min, B.-G.; Gunji, M.; Hung, P. Y.; Ok, I.; Rodgers, M.; Franca, D. L.; Gausepohl, S.; Hobbs, C.; Kirsch, P. D.; Jammy, R.

Book ID: 126594741
Publisher: IEEE
Year: 2011
Weight: 628 KB
Category: Article
ISBN: 1457717557
DOI: 10.1109/ISDRS.2011.6135201

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