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[IEEE 2011 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) - Hangzhou, China (2011.05.10-2011.05.12)] 2011 IEEE International Instrumentation and Measurement Technology Conference - Development of the micro displacement measurement system based on astigmatic method

✍ Scribed by Hsu, Wei-Yao; Yu, Zong-Ru; Chen, Po-Jui; Kuo, Ching-Hsiang; Hwang, Chi-Hung

Book ID: 125469318
Publisher: IEEE
Year: 2011
Weight: 292 KB
Category: Article
ISBN: 1424479339
DOI: 10.1109/imtc.2011.5944122

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