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[IEEE 2010 18th Biennial University/ Government/Industry Micro/Nano Symposium (UGIM) - West Lafayette, IN, USA (2010.06.28-2010.07.1)] 2010 18th Biennial University/Government/Industry Micro/Nano Symposium - No-Power MEMS Devices Using Buckled Diaphragms and Engineered Stress

โœ Scribed by Walsh, Kevin M.; Gowrishetty, Usha R.


Book ID
126013143
Publisher
IEEE
Year
2010
Weight
357 KB
Category
Article
ISBN
1424447313

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