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[IEEE 2010 18th Biennial University/ Government/Industry Micro/Nano Symposium (UGIM) - West Lafayette, IN, USA (2010.06.28-2010.07.1)] 2010 18th Biennial University/Government/Industry Micro/Nano Symposium - Maskless Direct Write Grayscale Lithography for MEMS Applications

✍ Scribed by McKenna, Curt; Walsh, Kevin; Crain, Mark; Lake, Joseph

Book ID: 120076052
Publisher: IEEE
Year: 2010
Weight: 989 KB
Category: Article
ISBN: 1424447313
DOI: 10.1109/UGIM.2010.5508906

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