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[IEEE 2009 Proceedings of the European Solid State Device Research Conference (ESSDERC) - Athens, Greece (2009.09.14-2009.09.18)] 2009 Proceedings of the European Solid State Device Research Conference - Conduction and Trapping in RF MEMS capacitive switches with a SiN layer

✍ Scribed by Koszewski, Adam; Souchon, Frederic; Ouisse, Thierry

No coin nor oath required. For personal study only.

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