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[IEEE 2009 IEEE Workshop on Microelectronics and Electron Devices (WMED) - Boise, Idaho, USA (2009.04.3-2009.04.3)] 2009 IEEE Workshop on Microelectronics and Electron Devices - Integration of IC Industry Feature Sizes with University Back-End-of-Line Post Processing: Example Using a Phase-Change Memory Test Chip

✍ Scribed by Regner, Jennifer; Balasubramanian, M.; Cook, Beth; Li, Yingting; Kassayebetre, Hiwot; Sharma, Anshika; Baker, R. Jacob; Campbell, Kristy A.

Book ID: 126751695
Publisher: IEEE
Year: 2009
Weight: 458 KB
Category: Article
ISBN: 142443551X
DOI: 10.1109/WMED.2009.4816141

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