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[IEEE 2006 International Electron Devices Meeting - San Francisco, CA, USA (2006.12.11-2006.12.13)] 2006 International Electron Devices Meeting - Highly Manufacturable TiN Metal Gate Nanorod Transistors Realized on Silicon-On-ONO (SOONO) Substrate

✍ Scribed by Kim, Sung Hwan; Oh, Chang Woo; Choi, Yong Lack; Hong, Sung-In; Kim, Na Young; Bae, Hyun Jun; Kim, Sung-Han; Park, Heung Sik; Yoon, Je Bum; Park, Im Soo; Kim, Dong-Won; Park, Donggun; Ryu, Byung-Il

Book ID: 118185069
Publisher: IEEE
Year: 2006
Weight: 521 KB
Volume: 0
Category: Article
ISBN-13: 9781424404384
DOI: 10.1109/iedm.2006.346927

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