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[IEEE 2006 European Solid-State Device Research Conference - Montreux, Switzerland (2006.09.19-2006.09.21)] 2006 European Solid-State Device Research Conference - Above IC integrated SrTiO3 high K MIM capacitors

✍ Scribed by Defay, Emmanuel; Wolozan, David; Garrec, Pierre; Andre, Bernard; Ulmer, Laurent; Aid, Marc; Blanc, Jean-pierre; Serret, Emmanuelle; Delpech, Philippe; Giraudin, Jean-christophe; Guillan, Julie; Pellissier, Denis; Ancey, Pascal

Book ID: 121364744
Publisher: IEEE
Year: 2006
Weight: 665 KB
Category: Article
ISBN-13: 9781424403011
DOI: 10.1109/ESSDER.2006.307669

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