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[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Three-dimensional simulation of the deep UV light intensity distribution in SU-8 photorsists

✍ Scribed by Feng, Ming; Hang, Qing-an; Li, Wei-hua; Zhou, Zai-fa; Zhu, Zhen

Book ID: 120261895
Publisher: IEEE
Year: 2006
Weight: 152 KB
Category: Article
ISBN-13: 9781424401604
DOI: 10.1109/ICSICT.2006.306430

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