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[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Lumped behavioral modeling for suspended MEMS

✍ Scribed by Guangbao, Shan; Hailongk, Weih; Youbao, Liu

Book ID: 118117728
Publisher: IEEE
Year: 2006
Weight: 106 KB
Volume: 0
Category: Article
ISBN-13: 9781424401604
DOI: 10.1109/icsict.2006.306435

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