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[IEEE 2003 IEEE International Integrated Reliability Workshop Final Report - Lake Tahoe, CA, USA (20-23 Oct. 2003)] IEEE International Integrated Reliability Workshop Final Report, 2003 - Physically-based simulation of the early and long-term failures in the copper dual damascene interconnect

✍ Scribed by Sukharev, V.; Choudhury, R.; Park, C.W.

Book ID: 126639775
Publisher: IEEE
Year: 2003
Tongue: English
Weight: 408 KB
Category: Article
ISBN-13: 9780780381575
DOI: 10.1109/IRWS.2003.1283305

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