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[IEEE 2002 IEEE International Reliability Physics Symposium Proceedings. 40th Annual - Dallas, TX, USA (7-11 April 2002)] 2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320) - Pin-joint design effect on the reliability of a polysilicon microengine

โœ Scribed by Tanner, D.M.; Walraven, J.A.; Mani, S.S.; Swanson, S.E.


Book ID
126706734
Publisher
IEEE
Year
2002
Weight
747 KB
Category
Article
ISBN-13
9780780373525

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