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[IEEE 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 - Singapore (9-13 July 2001)] Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) - Plasma damage in floating metal-insulator-metal capacitors

✍ Scribed by Ackaert, J.; Zhichun Wang, ; De Backer, E.; Coppens, P.

Book ID: 126605092
Publisher: IEEE
Year: 2001
Weight: 303 KB
Category: Article
ISBN-13: 9780780366756
DOI: 10.1109/IPFA.2001.941491

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