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[IEEE 2000 Semiconductor Manufacturing Technology Workshop - Hsinchu, Taiwan (14-15 June 2000)] 2000 Semiconductor Manufacturing Technology Workshop (Cat. No.00EX406) - A cost-based heuristic for statistically determining sampling frequency in a wafer fab

✍ Scribed by Chen-Fu Chien, ; Shao-Chung Hsu, ; Peng, S.; Chia-Hung Wu,

Book ID: 126605209
Publisher: IEEE
Year: 2000
Weight: 647 KB
Category: Article
ISBN-13: 9780780363748
DOI: 10.1109/SMTW.2000.883099

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