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[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - Charge exchange cross sections relevant to ion implantation for ultra shallow junctions

✍ Scribed by Van Den Berg, J.A.; Wostenholm, G.; Geryk, M.; Armour, D.G.; Cook, C.E.A.; Murrell, A.J.

Book ID: 120550547
Year: 2000
Weight: 415 KB
Category: Article
ISBN-13: 9780780364622
DOI: 10.1109/.2000.924231

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