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[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - Junction profiles of sub keV ion implantation for deep sub-quarter micron devices

✍ Scribed by Al-Bayati, A.; Tandon, S.; Doherty, R.; Murrell, A.; Wagner, D.; Foad, M.; Adibi, B.; Mickevicius, R.; Menisilenko, V.; Simeonov, S.; Jian, A.; Sing, D.; Ferguson, C.; Murto, R.; Larson, L.

Book ID: 120159459
Publisher: Ieee
Year: 2000
Tongue: English
Weight: 402 KB
Edition: 2000
Category: Article
ISBN-13: 9780780364622
DOI: 10.1109/.2000.924097

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