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[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - Process simulator for plasma enhanced sputter deposition system

✍ Scribed by Miyagawa, Y.; Tanaka, M.; Nakadate, H.; Nakao, S.; Miyagawa, S.

Book ID: 120029417
Year: 2000
Weight: 394 KB
Category: Article
ISBN-13: 9780780364622
DOI: 10.1109/.2000.924127

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