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[IEEE 2000 IEEE Hong Kong Electron Devices Meeting - Hong Kong, China (24 June 2000)] Proceedings 2000 IEEE Hong Kong Electron Devices Meeting (Cat. No.00TH8503) - Measurement of Young's modulus of nickel silicide film by a surface profiler

✍ Scribed by Ming Qin, ; Yuen, C.Y.; Poon, M.C.; Chan, W.Y.

Book ID: 120003001
Publisher: IEEE
Year: 2000
Tongue: English
Weight: 285 KB
Edition: 2000 ed.
Category: Article
ISBN-13: 9780780363045
DOI: 10.1109/HKEDM.2000.904217

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