✦ LIBER ✦

[IEEE 1997 IEEE International SOI Conference Proceedings - Fish Camp, CA, USA (6-9 Oct. 1997)] 1997 IEEE International SOI Conference Proceedings - Quality of SOI film after surface smoothing with hydrogen annealing, touch-polishing

✍ Scribed by Maszara, W.P.; Gondran, C.F.H.; Jackett-Murphy, S.; Vasudev, P.K.; Iyer, S.S.; Anc, M.J.

No coin nor oath required. For personal study only.

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