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[IEEE 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (21-25 July 1997)] Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Analysis of dopant metrology using scanning capacitance microscopy and transmission electron microscopy as complementary techniques

✍ Scribed by Natarajan, M.; Sheng, T.T.; Pey, K.L.; Lee, Y.P.; Radhakrishnan, M.K.

Book ID: 126631076
Publisher: IEEE
Year: 1997
Weight: 735 KB
Category: Article
ISBN-13: 9780780339859
DOI: 10.1109/IPFA.1997.638126

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