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[IEEE 1997 2nd International Workshop on Statistical Metrology - Kyoto, Japan (8 June 1997)] 1997 2nd International Workshop on Statistical Metrology - Response surface characterization of the deposition of LPCVD SiGe for solid-phase crystallized poly-TFTs

✍ Scribed by Subramanian, V.; Saraswat, K.C.; Hovagimian, H.; Mehlhaff, J.

Book ID: 126616743
Publisher: IEEE
Year: 1997
Weight: 336 KB
Category: Article
ISBN-13: 9780780337374
DOI: 10.1109/IWSTM.1997.629422

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