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[IEEE 1995 International Semiconductor Conference. CAS '95 - Sinaia, Romania (11-14 Oct. 1995)] 1995 International Semiconductor Conference. CAS '95 Proceedings - Structural and electrical properties of thin rf sputtered Ta/sub 2/O/sub 5/

✍ Scribed by Dimitrova, T.; Atanassova, E.

Book ID: 126724064
Publisher: IEEE
Year: 1995
Weight: 263 KB
Category: Article
ISBN-13: 9780780326477
DOI: 10.1109/SMICND.1995.494916

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