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[IEEE 1979 IEEE International Solid-State Circuits Conference - Philadelphia, PA, USA (1979.02.14-1979.02.16)] 1979 IEEE International Solid-State Circuits Conference. Digest of Technical Papers - Proximity effect correction in EB lithography for VSLI microfabrication

✍ Scribed by Saitoh, K.; Shimizu, K.

Book ID: 118167843
Publisher: IEEE
Year: 1979
Weight: 780 KB
Volume: 0
Category: Article
DOI: 10.1109/isscc.1979.1155914

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