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[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - SiGe and SiGeC surface alloy formation using high dose implantation and solid phase epitaxy

✍ Scribed by Xiang Lu, ; Cheung, N.W.

Book ID: 125510427
Publisher: IEEE
Year: 1997
Weight: 602 KB
Category: Article
ISBN-13: 9780780332898
DOI: 10.1109/IIT.1996.586507

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