Identification of diffusing species during metal silicide oxidation by Rutherford backscattering spectrometry

✍ Scribed by Jiann-Ruey Chen; Bor-Yir Chen; Shou-Gwo Wuu; Yuen-Chung Liu

• Book ID: 113277704
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 581 KB
• Volume: 15
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(86)90303-4