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ICP etching of sapphire substrates

โœ Scribed by Y.P. Hsu; S.J. Chang; Y.K. Su; J.K. Sheu; C.H. Kuo; C.S. Chang; S.C. Shei

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
311 KB
Volume
27
Category
Article
ISSN
0925-3467

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Superconducting thin films of TBCCO have been prepared directly on R-plane sapphire substrates and on CeO 2 buffer layers on sapphire. The superconducting properties of the films on the buffered sapphire are quite encouraging, with Jc values in excess of 5.104 A/cm 2. However, a potential problem wi